HYDROGEN PASSIVATION OF A SUBSTITUTIONAL SULFUR DEFECT IN SILICON

被引:20
作者
YAPSIR, AS
DEAK, P
SINGH, RK
SNYDER, LC
CORBETT, JW
LU, TM
机构
[1] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12181
[2] SUNY ALBANY,ALBANY,NY 12222
来源
PHYSICAL REVIEW B | 1988年 / 38卷 / 14期
关键词
D O I
10.1103/PhysRevB.38.9936
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:9936 / 9940
页数:5
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