THE EFFECTS OF SUBSTRATE-TEMPERATURE ON THE SUPERCONDUCTING PROPERTIES OF TL2CA2BA2CU3O10 FILMS SPUTTER-DEPOSITED FROM STOICHIOMETRIC OXIDE TARGETS

被引：11

作者：

LEE, WY ^{[1
]}

SALEM, J ^{[1
]}

LEE, V ^{[1
]}

DELINE, V ^{[1
]}

HUANG, TC ^{[1
]}

SAVOY, R ^{[1
]}

DURAN, J ^{[1
]}

SANDSTROM, RL ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

PHYSICA C | 1989年 / 160卷 / 5-6期

关键词：

Ceramic Materials - Mass Spectrometers - Sputtering - Thallium Compounds;

D O I：

10.1016/0921-4534(89)90428-0

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The annealing characteristics and the superconducting properties of Tl2Ca2Ba2Cu3O10 films sputter-deposited onto yttrium-stabilized ZrO2 substrate at ambient temperature to 500°C from dual stoichiometric oxide targets using a symmetrical RF diode sputtering configuration are reported. The films deposited at 400-500°C require a lower annealing temperature than that for the films deposited at lower temperatures to achieve the highest Tc. The highest Tc achieved was found to decrease with increasing substrate temperature, a zero resistance Tc of 121 and approximately 90 K, respectively, being observed for the films deposited at ambient temperature and 500°C. The lower temperature annealing required for the films deposited at higher substrate temperatures is attributed to the film microstructure which is more prone to material transport during annealing, as indicated by the SIMS depth profiles of the annealed films.

引用

页码：511 / 516

页数：6

共 23 条

[1] SUPERCONDUCTING THIN-FILMS OF BI-SR-CA-CU-O AND TL-BA-CA-CU-O WITH TC ABOVE 100-K [J].