2-PHOTON EXCITED LIF DETERMINATION OF H-ATOM CONCENTRATIONS NEAR A HEATED FILAMENT IN A LOW-PRESSURE H-2 ENVIRONMENT

被引：92

作者：

MEIER, U ^{[1
]}

KOHSEHOINGHAUS, K ^{[1
]}

SCHAFER, L ^{[1
]}

KLAGES, CP ^{[1
]}

机构：

[1] PHILIPS GMBH,HAMBURG RES LAB,W-2000 HAMBURG 54,GERMANY

来源：

APPLIED OPTICS | 1990年 / 29卷 / 33期

关键词：

Atomic hydrogen; Hot filament CVD of diamond; Quantitative concentration measurements; Two-photon laser-induced fluorescence;

D O I：

10.1364/AO.29.004993

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

With respect to the investigation of low pressure filament-assisted chemical vapor deposition processes for diamond formation, absolute concentrations of atomic hydrogen were determined by two-photon laser- induced fluorescence in the vicinity of a heated filament in an environment containing H2 or mixtures of H2 and CH4. Radial H concentration profiles were obtained for different pressures and filament temperatures, diameters, and materials. The influence of the addition of various amounts of methane on the H atom concentrations was examined. © 1990 Optical Society of America.

引用

页码：4993 / 4999

页数：7

共 21 条

[1] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].