VERTICALLY TAPERED SPOT SIZE TRANSFORMERS FABRICATED BY A SIMPLE MASKING TECHNIQUE

被引：20

作者：

JACOBS, B ^{[1
]}

ZENGERLE, R ^{[1
]}

FALTIN, K ^{[1
]}

WEIERSHAUSEN, W ^{[1
]}

机构：

[1] UNIV ULM,DEPT OPTOELECTRON,D-89081 ULM,GERMANY

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 10期

关键词：

OPTICAL COUPLERS; OPTICAL FIBERS; OPTICAL WAVE-GUIDES;

D O I：

10.1049/el:19950527

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel, simple fabrication method of vertically tapered spot size transformers is demonstrated by screening the sample partially with a shadow mask during reactive ion etching. The authors measured a transmission loss of 2.3dB for a single taper structure from the chip waveguide without an antireflection coating on the fibre.

引用

页码：794 / 796

页数：3

共 6 条

[1]

BRENNER T, 1992, ELECTRON LETT, V28, P6231

[2]

BUUS J, 1994, ASYMMETRIC SPOT SIZE

[3] TAPERED WAVE-GUIDE INGAAS/INGAASP MULTIPLE-QUANTUM-WELL LASERS [J].