LATTICE-LOCATION STUDY OF HF IMPLANTED IN NI

被引:16
作者
KAUFMANN, EN [1 ]
POATE, JM [1 ]
AUGUSTYNIAK, WM [1 ]
机构
[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
关键词
D O I
10.1103/PhysRevB.7.951
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:951 / 955
页数:5
相关论文
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