IMAGING PROPERTIES OF THE SCHWARZSCHILD SOFT-X-RAY MICROSCOPES

被引:4
作者
HORIKAWA, Y
机构
[1] T. Morokuma Research Laboratory, Olympus Optical Co., Ltd, Hachioji-shi, Tokyo, 192
关键词
D O I
10.1080/09500349314552021
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The imaging properties of the soft-X-ray microscopes composed of a Schwarzschild objective and a grazing incidence mirror condenser are discussed. Fundamental formulae on the partially coherent transfer function, the resolution of a two-point object and the edge response have been derived by consideration of the optical properties of an object in soft-X-ray regions. Then these imaging properties for the microscopes are investigated with the formulae and compared with those for a normal circular pupil system.
引用
收藏
页码:2025 / 2038
页数:14
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