BLOCK-BY-BLOCK DEPOSITION - A NEW GROWTH METHOD FOR COMPLEX OXIDE THIN-FILMS

被引:80
作者
LOCQUET, JP
CATANA, A
MACHLER, E
GERBER, C
BEDNORZ, JG
机构
[1] IBM Research Division, Zurich Research Laboratory
关键词
D O I
10.1063/1.111151
中图分类号
O59 [应用物理学];
学科分类号
摘要
An alternative growth method for high-T(c) oxide thin films employing molecular beam deposition is proposed. Instead of an uncontrolled local nucleation followed by lateral growth and island coalescence, the new method provides substrate coverage by nonreacting constituents before nucleation is initiated, a controlled reaction path, and reduced lateral growth. DyBa2Cu3O6+delta films without precipitates, with a surface roughness of +/- 1 unit cell and showing finite size oscillations in the x-ray diffraction spectrum, have been prepared. This method reveals that diffusion dominates the growth process at high substrate temperatures (congruent-to 700-degrees-C).
引用
收藏
页码:372 / 374
页数:3
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