INTRACAVITY LASER SPECTROSCOPY OF RF PLASMAS OF METHANE AND BENZENE USED IN DEPOSITING DIAMOND-LIKE CARBON-FILMS

被引：4

作者：

LIPP, MJ ^{[1
]}

OBRIEN, JJ ^{[1
]}

机构：

[1] UNIV MISSOURI,CTR MOLEC ELECTR,ST LOUIS,MO 63121

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 10期

关键词：

D O I：

10.1063/1.112040

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spatially resolved concentrations of excited atomic hydrogen (n = 2), generated from 13.56 MHz RF hydrocarbon discharges, are determined during film formation using intracavity laser spectroscopy. Self-bias voltages and pressures of methane (25 and 100 mTorr) and benzene (25 mTorr) are selected so that diamondlike carbon films are deposited. In all cases, the minimum concentration occurs at the power electrode. Benzene produces the least amount of excited atomic hydrogen overall. The results may have implications concerning the proposed impact induced fragmentation of hydrocarbon molecules during film growth.

引用

页码：1317 / 1319

页数：3

共 23 条

[1] DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J].