ANALYSIS OF CHEMICAL AMPLIFICATION RESIST SYSTEMS USING A KINETIC-MODEL AND NUMERICAL-SIMULATION

被引：8

作者：

FUKUDA, H

OKAZAKI, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2104

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2104 / 2109

页数：6

共 11 条

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