A STANDARD FORM OF SPECTRA FOR QUANTITATIVE ESCA-ANALYSIS

The transmission of an electron energy analyzer depends on the parameters of operation. Therefore the intensity ratios of the ESCA peaks within a spectrum vary with the values of pass energy, angular acceptance, and analysis area chosen by the operator. A simple correction is possible if the transmission does not directly depend on the kinetic energy of the electrons, but is a function of the retardation ratio only. Then it is sufficient to determine the transmission once with an arbitrary sample within the range of retardation ratios and instrumental parameters of interest. After correction of the spectra with this function, quantitative evaluation may be performed by means of sensitivity factors which do not depend on the instrument and its operation mode any more.