INVESTIGATION AND COMPENSATION OF THE NONLINEARITY OF HETERODYNE INTERFEROMETERS

被引：201

作者：

HOU, WM ^{[1
]}

WILKENING, G ^{[1
]}

机构：

[1] ALEXANDER VONHUMBOLDT STIFTUNG,BONN,GERMANY

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1992年 / 14卷 / 02期

关键词：

HETERODYNE INTERFEROMETRY; NONORTHOGONALITY; DISPLACEMENT INTERFEROMETRY; HIGH-ACCURACY INTERFEROMETRY;

D O I：

10.1016/0141-6359(92)90054-Z

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The nonlinearity of heterodyne interferometers is mainly influenced by the nonorthogonality and ellipticity of the linearly polarized partial beams of the laser and by the limited extinction capability of the polarizing beam splitters. The phase errors at the interferometer output can be detected by measuring the phase difference between the two orthogonal directions in the output beam. This arrangement can be used to check an interferometer setup for causes of nonlinearity and to eliminate them by adjustment, replacement, etc. The arithmetical mean value of the phases of the two orthogonal output signals is linear, except for a residual error. These detection and compensation capabilities of the proposed phase measurement arrangement are demonstrated by experimental investigations.

引用

页码：91 / 98

页数：8

共 8 条

[1]

Sommargren, A new measurement system for precision metrology, Prec Eng, 9, pp. 179-184, (1987)

[2]

Quenelle, Wuerz, A new micrometer-controlled laser dimensional measurement and analysis system, Hewlett Packard Journal, 34, pp. 3-13, (1983)

[3]

Dorenwendt, Probst, Hochauflösende Interferometrie mit Zweifrequenzlasern, PTB-Mitt, 90, pp. 359-362, (1980)

[4]

Reinboth, Wilkening, Optische Phasenschieber für Zweifrequenz-Laser-Interferometrie, PTB-Mitt, 93, pp. 168-174, (1983)

[5]

Bobroff, Residual errors in laser interferometry from air turbulence and nonlinearity, Applied Optics, 26, pp. 2676-2682, (1987)

[6]

Sutton, Non-linearity in length measurement using heterodyne laser Michelson interferometry, J Phys E, 20, pp. 1290-1292, (1987)

[7]

Steinmetz, Sub-micron position measurement and control on precision machine tools with laser interferometry, Prec Eng, 12, pp. 12-24, (1990)

[8]

Rosebluth, Bobroff, Optical sources of non-linearity in heterodyne interferometers, Precision Engineering, 12, pp. 7-11, (1990)

← 1 →