OPTICAL-CONSTANTS OF ION-IRRADIATED HYDROGENATED AMORPHOUS-CARBON FILMS

被引：13

作者：

COMPAGNINI, G

FOTI, G

REITANO, R

MONDIO, G

机构：

[1] UNIV CATANIA,DIPARTIMENTO FIS,CORSO ITALIA 57,I-95129 CATANIA,ITALY

[2] UNIV MESSINA,IST STRUTTURA MAT,I-98166 SANT AGATA,ITALY

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1993年 / 162卷 / 03期

关键词：

D O I：

10.1016/0022-3093(93)91242-U

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Optical constants in the range 1-6 eV of ion-irradiated hydrogenated amorphous carbon have been obtained in order to gain information on the atomic and electronic structure of this material. The film composition was checked by the elastic recoil detection technique and Rutherford backscattering. Ion irradiation leads to a decrease of hydrogen concentration (up to 10%) and an increase of trigonal carbon fraction (up to 60%). A comparison with several atomic models is reported.

引用

页码：237 / 243

页数：7

共 27 条

[1]

ADEL ME, 1987, AMORPHOUS HYDROGENAT, P335

[2]

ALTEROVITZ SA, 1989, MATER RES SOC S P, V152, P21

[3] A NEW APPROACH IN THE OPTICAL CHARACTERIZATION OF AMORPHOUS HYDROGENATED SILICON CARBON ALLOYS [J].