LASER-HEATING OF SEMICONDUCTORS - EFFECT OF CARRIER DIFFUSION IN NON-LINEAR DYNAMIC HEAT-TRANSPORT PROCESS

被引：21

作者：

KIM, DM ^{[1
]}

KWONG, DL ^{[1
]}

SHAH, RR ^{[1
]}

CROSTHWAIT, DL ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,SEMICOND RES & DEV LAB,DALLAS,TX 75222

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 08期

关键词：

D O I：

10.1063/1.329440

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4995 / 5006

页数：12

共 27 条

[11] TEMPERATURE RISE INDUCED BY A LASER-BEAM [J].

LAX, M .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) :3919-3924

[12] TRANSIENT OPTICAL REFLECTIVITY STUDY OF LASER ANNEALING OF ION-IMPLANTED SILICON - THRESHOLDS AND KINETICS [J].

LIU, YS ;

WANG, KL .

APPLIED PHYSICS LETTERS, 1979, 34 (06) :363-365

[13] RAMAN MEASUREMENT OF LATTICE TEMPERATURE DURING PULSED LASER-HEATING OF SILICON [J].

LO, HW ;

COMPAAN, A .

PHYSICAL REVIEW LETTERS, 1980, 44 (24) :1604-1607

[14] OPTICAL HEATING IN SEMICONDUCTORS [J].

MEYER, JR ;

BARTOLI, FJ ;

KRUER, MR .

PHYSICAL REVIEW B, 1980, 21 (04) :1559-1568

[15] OPTICAL HEATING IN SEMICONDUCTORS - LASER DAMAGE IN GE, SI, INSB, AND GAAS [J].

MEYER, JR ;

KRUER, MR ;

BARTOLI, FJ .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) :5513-5522

[16]

MORSE PM, 1953, METHODS THEORETICAL, V1

[17] TEMPERATURE DISTRIBUTIONS PRODUCED IN SEMICONDUCTORS BY A SCANNING ELLIPTICAL OR CIRCULAR CW LASER-BEAM [J].

NISSIM, YI ;

LIETOILA, A ;

GOLD, RB ;

GIBBONS, JF .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :274-279

[18] COMPUTER-SIMULATION OF LASER ANNEALING SILICON AT 1.06 MU-M [J].

SCHULTZ, JC ;

COLLINS, RJ .

APPLIED PHYSICS LETTERS, 1979, 34 (01) :84-87

[19] CALCULATION OF THE DYNAMICS OF SURFACE MELTING DURING LASER ANNEALING [J].

SURKO, CM ;

SIMONS, AL ;

AUSTON, DH ;

GOLOVCHENKO, JA ;

SLUSHER, RE ;

VENKATESAN, TNC .

APPLIED PHYSICS LETTERS, 1979, 34 (10) :635-637

[20] REASONS TO BELIEVE PULSED LASER ANNEALING OF SI DOES NOT INVOLVE SIMPLE THERMAL MELTING [J].

VANVECHTEN, JA ;

TSU, R ;

SARIS, FW ;

HOONHOUT, D .

PHYSICS LETTERS A, 1979, 74 (06) :417-421

← 1 2 3 →