INTEGRATED-CIRCUIT COMPATIBLE ELECTROSTATIC POLYSILICON MICRORELAYS

被引：31

作者：

GRETILLAT, MA

THIEBAUD, P

LINDER, C

DEROOIJ, NF

机构：

[1] Inst. of Microtechnol., Neuchatel Univ.

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1088/0960-1317/5/2/026

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-power IC-compatible electrostatically driven microrelay is presented. The mechanical part of the microrelay consists of a poysilicon/silicon nitride/polysilicon microbridge realized by sacrificial layer technology. Its fabrication, operation up to 100 kHz and net switching voltages in the 1 to 10 V range are reported.

引用

页码：156 / 160

页数：5

共 8 条

[1]

Gretillat M.-A., 1994, Proceedings IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (Cat. No.94CH3404-1), P97, DOI 10.1109/MEMSYS.1994.555605

[2] INTEGRATED SHIELDING LINES ON MULTILAYER POLYSILICON RESONATORS [J].

GRETILLAT, MA ;

LINDER, C ;

DEROOIJ, NF .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :351-356

[3]

Hosaka H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P12, DOI 10.1109/MEMSYS.1993.296943

[4]

LINDER C, 1993, THESIS U NEUCHATEL, pCH3

[5]

Linder C., 1990, SENSOR ACTUAT A-PHYS, V21, P1053

[6] MICROMECHANICAL MEMBRANE SWITCHES ON SILICON [J].

PETERSEN, KE .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1979, 23 (04) :376-385

[7]

Sakata M., 1989, Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3), P149, DOI 10.1109/MEMSYS.1989.77980

[8]

VANDENVLEKKERT HH, 1988, ANALUSIS, V16, P110

← 1 →