Theory of cathode sputtering in low voltage gaseous discharges

被引:43
作者
Townes, CH [1 ]
机构
[1] Bell Tel Labs, Murray Hill, NJ USA
来源
PHYSICAL REVIEW | 1944年 / 65卷 / 11/12期
关键词
D O I
10.1103/PhysRev.65.319
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:319 / 327
页数:9
相关论文
共 15 条
  • [1] BAUM T, 1926, Z PHYS, V40, P686
  • [2] Bichowsky F.R., 1936, THERMOCHEMISTRY CHEM
  • [3] BLECHSCHMIDT, 1928, ANN PHYS, V86, P1006
  • [4] Blechschmidt E, 1926, ANN PHYS-BERLIN, V81, P999
  • [5] CARSLAW HS, 1921, MATH THEORY CONDUCTI, P149
  • [6] The mechanism of electrical discharges in gases of low pressure
    Druyvesteyn, MJ
    Penning, FM
    [J]. REVIEWS OF MODERN PHYSICS, 1940, 12 (02) : 0087 - 0174
  • [7] Cathode sputtering II The derivation of the law of impact sputtering with the aid of silver in hydrogen
    Guntherschulze, A
    [J]. ZEITSCHRIFT FUR PHYSIK, 1926, 38 (08): : 575 - 588
  • [8] Electron Exchange of slower Ions
    Kallmann, H.
    Rosen, B.
    [J]. ZEITSCHRIFT FUR PHYSIK, 1930, 64 (11-12): : 806 - 816
  • [9] LOEB LB, 1939, FDN PROCESSES ELECT, P578
  • [10] Massey HSW, 1931, P CAMB PHILOS SOC, V27, P460