ANALYSIS AND DESIGN OF LOW-DIMENSIONAL STRUCTURES AND DEVICES USING STRAIN .2. STRAINED LAYER SYSTEMS

被引:6
作者
DUNSTAN, DJ
ADAMS, AR
机构
[1] Dept. of Phys., Surrey Univ., Guildford
关键词
Semiconductor Devices;
D O I
10.1088/0268-1242/5/12/010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Large biaxial strains may be imposed on thin layers by epitaxial growth on a mismatched substrate. Such strained layers offer advantages in semiconductor devices as well as interesting new physics. Some recent work on the structural and electronic properties of (InAGa)As strained layers on GaAs is reviewed here, together with some results on the processing of device structures.
引用
收藏
页码:1202 / 1208
页数:7
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