TAILORING OF SURFACE-PROPERTIES BY REMOVAL AND DEPOSITION WITH LASER-RADIATION

被引：10

作者：

KREUTZ, EW

FRERICHS, H

MERTIN, M

WESNER, DA

PFLEGING, W

机构：

[1] D-52074 Aachen

来源：

APPLIED SURFACE SCIENCE | 1995年 / 86卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00396-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.

引用

页码：266 / 277

页数：12

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