共 6 条
- [1] Viswanathan, Bright, Seeger, Boucleot, Agnello, Warlaumont, Petrillo, Franch, Brunner, Polcari, delle Guardia, Puisto, EIPB, (1993)
- [2] Chen, Rousseaux, Haghiri-Gosnet, Decanini, Launois, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 10 B, (1992)
- [3] Guo, Leonard, Cerrina, Di Fabrizio, Luciani, Gentilli, Gerold, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 10 B, (1992)
- [4] Kupka, Chen, Rousseaux, Haghiri-Gosnet, Launois, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 11 B, (1993)
- [5] Hector, Schattenburg, Anderson, Chu, Wong, Smith, EIPB, (1993)
- [6] White, Ocola, Cerrina, Valdimirsky, Maldonado, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 9 B, (1991)