CONTROLLED PREPARATION OF LOW SEE SURFACES BY EVAPORATION OF METAL FILMS UNDER HIGH RESIDUAL GAS PRESSURES

被引：22

作者：

THOMAS, S

PATTINSON, EB

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1970年 / 3卷 / 10期

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D O I：

10.1088/0022-3727/3/10/312

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1469 / +

页数：1

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