DEPENDENCE OF STRUCTURAL AND ELECTRICAL-PROPERTIES OF UNDOPED SPRAY-DEPOSITED INDIUM OXIDE THIN-FILMS ON DEPOSITION TEMPERATURE

被引:18
作者
MIRZAPOUR, S
ROZATI, SM
TAKWALE, MG
MARATHE, BR
BHIDE, VG
机构
[1] School of Energy Studies, Department of Physics, University of Poona, Pune
关键词
D O I
10.1016/0167-577X(92)90231-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of undoped In2O3 have been deposited at different substrate temperatures using the spray pyrolysis technique. These films show a preferred orientation which depends upon the deposition temperature of the substrate. The number of charge carriers and their mobility for the films have been measured and attempts have been made to explain these results. The results of optical transmission and energy band gap measurements are also included.
引用
收藏
页码:275 / 278
页数:4
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