X-RAY PHOTOELECTRON-SPECTROSCOPY OF CALCIUM-ION-IMPLANTED TITANIUM

被引：83

作者：

HANAWA, T ^{[1
]}

UKAI, H ^{[1
]}

MURAKAMI, K ^{[1
]}

机构：

[1] ISHIKAWAJIMA HARIMA HEAVY IND CO LTD,RES INST,KOTO KU,TOKYO 135,JAPAN

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1993年 / 63卷 / 04期

关键词：

D O I：

10.1016/0368-2048(93)80032-H

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

The surface of titanium before and after calcium-ion implantation by amounts of 10(16), 10(17), and 10(18) ions CM-2, has been characterized using X-ray photoelectron spectroscopy (XPS). The XPS data reveal that the structure of the surface modified layer of calcium-ion-implanted titanium is TiO2 containing a calcium oxide and a complex oxide of calcium and titanium near the surface. Binding-energy data on calcium-ion-implanted titanium are also supplied.

引用

页码：347 / 354

页数：8

共 20 条

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