NONLINEAR EXCITATION AND DISSOCIATION KINETICS IN DISCHARGES THROUGH MIXTURES OF RARE AND ATTACHING GASES

被引：54

作者：

SCHELLER, GR

GOTTSCHO, RA

INTRATOR, T

GRAVES, DB

机构：

[1] AT&T BELL LABS, MURRAY HILL, NJ 07974 USA

[2] UNIV CALIF BERKELEY, DEPT CHEM ENGN, BERKELEY, CA 94720 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 09期

关键词：

D O I：

10.1063/1.341287

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4384 / 4397

页数：14

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