AUTOMATIC INTERFERENCE METHOD FOR MEASURING TRANSPARENT FILM THICKNESS

被引：10

作者：

GONZALEZCANO, A ^{[1
]}

BERNABEU, E ^{[1
]}

机构：

[1] ESCUELA UNIV OPT, E-28034 MADRID, SPAIN

来源：

APPLIED OPTICS | 1993年 / 32卷 / 13期

关键词：

THICKNESS MEASUREMENT; THIN FILMS; INTERFEROMETRY; LASER;

D O I：

10.1364/AO.32.002292

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new method for analytically obtaining the form of an interferogram is proposed. The method permits simple implementation for a computerized treatment. We can use it to determine easily the thickness of a thin film.

引用

页码：2292 / 2294

页数：3