THE EVOLUTION OF MICROSTRUCTURE IN AL-2 PCT CU THIN-FILMS - PRECIPITATION, DISSOLUTION, AND REPRECIPITATION

被引:43
作者
FREAR, DR
SANCHEZ, JE
ROMIG, AD
MORRIS, JW
机构
[1] Lawrence Berkeley Laboratory, Berkeley, 94720, CA
[2] Sandia National Laboratories, Albuquerque, 87185, NM
来源
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE | 1990年 / 21卷 / 09期
关键词
D O I
10.1007/BF02646989
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The precipitation, dissolution, and reprecipitation processes of Al2Cu (θ phase) in Al-2 wt pct Cu thin films were studied. The films were characterized in the as-deposited condition, after annealing at 425 °C for 35 minutes, and after rapid thermal annealing (RTA) at 345 °C, 405 °C, and 472 °C. In the as-deposited samples, the precipitates had a fine even distribution throughout the thin film both at aluminum grain boundaries and within the aluminum grains. Annealing below the solvus temperature caused the grain boundary precipitates to grow and precipitates within the center of aluminum grains to diminish. Annealing above 425 °C caused the θ-phase precipitates to dissolve. Upon cooldown, the θ phase nucleated at aluminum grain boundaries and triple points in the form of plates. In situ heating and cooling experiments documented this process in real time. Analytical microscopy revealed that there is a depletion of copper at the aluminum grain boundaries in regions free of precipitates. The θ-phase precipitates nucleated and grew at the grain boundaries via a collector plate mechanism and drew copper from the areas adjacent to the aluminum grain boundaries. © 1990 The Metallurgical of Society of AIME.
引用
收藏
页码:2449 / 2458
页数:10
相关论文
共 27 条
[1]   GROWTH OF GRAIN BOUNDARY PRECIPITATES IN A1-4 PERCENT CU BY INTERFACIAL DIFFUSION [J].
AARON, HB ;
AARONSON, HI .
ACTA METALLURGICA, 1968, 16 (06) :789-&
[2]  
AHN KY, 1990, J ELECTRON MATER
[3]   REDUCTION OF ELECTROMIGRATION IN ALUMINUM FILMS BY COPPER DOPING [J].
AMES, I ;
DHEURLE, FM ;
HORSTMANN, RE .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (04) :461-+
[4]  
ARAD MS, 1965, J APPL PHYS, V36, P3860
[5]  
ARGARWALA BN, 1976, THIN SOLID FILMS, V34, P165
[6]  
ARGAWALA BN, 1972, J VAC SCI TECHNOL, V59, P1409
[7]   LATTICE AND GRAIN-BOUNDARY DIFFUSION OF COPPER IN THIN ALUMINUM FILMS [J].
CHAMBERLAIN, MB ;
LEHOCZKY, SL .
THIN SOLID FILMS, 1977, 45 (01) :189-194
[8]   COPPER DISTRIBUTION IN SPUTTERED AL-CU FILMS [J].
DENISON, DR ;
HARTSOUGH, LD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06) :1326-1331
[9]   ELECTROMIGRATION AND FAILURE IN ELECTRONICS - INTRODUCTION [J].
DHEURLE, FM .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (10) :1409-&
[10]   EFFECT OF COPPER ADDITIONS ON ELECTROMIGRATION IN ALUMINUM THIN FILMS [J].
DHEURLE, FM .
METALLURGICAL TRANSACTIONS, 1971, 2 (03) :683-&