ELECTRICAL-PROPERTIES OF NONSTOICHIOMETRIC TIN OXIDE-FILMS OBTAINED BY THE DC REACTIVE SPUTTERING METHOD

被引：33

作者：

LEJA, E

PISARKIEWICZ, T

KOLODZIEJ, A

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(80)90285-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：45 / 48

页数：4

共 6 条

[1] PREPARATION AND PROPERTIES OF TIN OXIDE-FILMS FORMED BY OXIDATION OF TETRAMETHYLTIN
BALIGA, BJ
GHANDHI, SK
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (06) : 941 - 944
[2] TRANSPARENT CONDUCTING COATINGS
HAACKE, G
[J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 : 73 - 93
[3] JACHIMOWSKI M, 1970, Patent No. 59981
[4] Kawamata E., 1977, Oyo Buturi, V46, P490
[5] Leja E., 1970, Acta Physica Polonica A, VA38, P165
[6] PHASE-COMPOSITION OF SNOX THIN-FILMS OBTAINED BY REACTIVE DC SPUTTERING
LEJA, E
KORECKI, J
KROP, K
TOLL, K
[J]. THIN SOLID FILMS, 1979, 59 (02) : 147 - 155