DEPOSITION OF MOLYBDENUM AND TUNGSTEN FILMS FROM VAPOR DECOMPOSITION OF CARBONYLS

被引:74
作者
KAPLAN, LH
DHEURLE, FM
机构
关键词
D O I
10.1149/1.2407607
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:693 / &
相关论文
共 24 条
  • [1] Austin JB, 1941, IND ENG CHEM, V33, P23, DOI 10.1021/ie50373a005
  • [2] KINETICS OF HETEROGENEOUS DECOMPOSITION OF IRON PENTACARBONYL
    CARLTON, HE
    OXLEY, JH
    [J]. AICHE JOURNAL, 1965, 11 (01) : 79 - &
  • [3] FUNDAMENTAL CONSIDERATIONS OF CARBONYL METALLURGY
    CARLTON, HE
    GOLDBERG.WM
    [J]. JOURNAL OF METALS, 1965, 17 (06): : 611 - &
  • [4] HETEROGENEOUS AND HOMOGENEOUS THERMAL DECOMPOSITIONS OF NICKEL CARBONYL
    CHAN, RK
    MCINTOSH, R
    [J]. CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1962, 40 (05): : 845 - &
  • [5] CHILDS WJ, 1951, T AM SOC METAL, V43, P105
  • [6] CLAUSER HR, 1963, ENCYCLOPEDIA ENGINEE, P430
  • [7] CLAUSER HR, 1963, ENCYCLOPEDIA ENGINEE, P686
  • [8] CUOMO JJ, TO BE PUBLISHED
  • [9] DHEURLE F, 1966, T MET SOC AIME, V236, P314
  • [10] DONALDSON JG, 1966, 6853 US DEP INT BUR