OXIDATION OF COLD COPPER-FILMS WITH OXYGEN RADICALS

被引：9

作者：

CLAMPITT, R

HANLEY, PE

机构：

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1988年 / 1卷 / 01期

关键词：

D O I：

10.1088/0953-2048/1/1/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5 / 6

页数：2

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