H+ LITHOGRAPHY FOR 3-D INTEGRATION OF OPTICAL CIRCUITS

被引：10

作者：

BRENNER, KH

FRANK, M

KUFNER, M

KUFNER, S

机构：

[1] University of Erlangen-Nuremberg, Physics Institute, Applied Optics Department, Erlangen

来源：

APPLIED OPTICS | 1990年 / 29卷 / 26期

关键词：

D O I：

10.1364/AO.29.003723

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

[No abstract available]

引用

页码：3723 / 3724

页数：2

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APPLIED OPTICS, 1988, 27 (20) :4251-4254

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[4] PLANAR INTEGRATION OF FREE-SPACE OPTICAL-COMPONENTS [J].

JAHNS, J ;

HUANG, A .

APPLIED OPTICS, 1989, 28 (09) :1602-1605

[5] INTEGRATED OPTICS - AN INTRODUCTION [J].

MILLER, SE .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2059-+

[6]

Nishihara H., 1989, OPTICAL INTEGRATED C

[7]

ZIEGLER JF, 1985, STOPPING IONS SOLIDS

[8]

1970, NUCLEAR DATA TABLE A, V7, P253