DEPENDENCE OF RESONANCE FREQUENCY OF A MEMBRANE VIBRATED PHOTOTHERMALLY ON PRESSURE AND GEOMETRY IN A LOW-VACUUM REGION

被引：5

作者：

INABA, S ^{[1
]}

HANE, K ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT ELECTR MECH ENGN,NAGOYA,AICHI 464,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 02期

关键词：

PHOTOTHERMAL VIBRATION; PHOTOTHERMAL EFFECT; PHOTOACOUSTIC EFFECT; LASER VACUUM GAUGE; PRESSURE GAUGE;

D O I：

10.1143/JJAP.32.1001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An experimental study of resonance frequency for a membrane vibrated photothermally in a low-vacuum region is described. The resonance frequency is decreased by the reaction force from gases around the vibrating membrane. Experimental values of resonance frequencies for various types of rectangular membranes in several kinds of gases agree well with theoretical ones.

引用

页码：1001 / 1004

页数：4

共 19 条

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