ELECTRON AND ION-BEAM INDUCED HEATING EFFECTS IN SOLIDS MEASURED BY LASER INTERFEROMETRY

被引:12
作者
KEMPF, J
NONNENMACHER, M
WAGNER, HH
机构
[1] German Manufacturing Technology Center, IBM Deutschland GmbH, Sindelfingen
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 56卷 / 04期
关键词
D O I
10.1007/BF00324360
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A sensitive interferometric technique has been applied for studying the thermal displacement of thin film heated by electron or ion beams. The steady state displacement has been measured and we discuss the dependence on material properties and film thickness showing that this method has a potential for in-situ monitoring of thin-film deposition or etching. Transient effects are studied in a thin quartz plate and the propagation velocity of thermal waves is measured.
引用
收藏
页码:385 / 390
页数:6
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