DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY

被引:165
作者
MULLER, RH
机构
[1] Inorganic Materials Research Division, Lawrence Radiation Laboratory, University of California, Berkeley
关键词
D O I
10.1016/0039-6028(69)90003-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Many parameters which appear in the theory of ellipsometry crucially depend on the choice of arbitrary conventions and definitions. This dependence is discussed for nine two-fold choices. On the basis of literature usage, preferences are expressed for one of each of the alternatives and for the nomenclature of the variables involved. © 1969.
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页码:14 / &
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