ANALYTICAL ELECTRON-MICROSCOPY OF MULTILAYERED THIN-FILMS USING MICROCLEAVAGE

被引：11

作者：

LEPETRE, Y

SCHULLER, IK

RASIGNI, G

RIVOIRA, R

PHILIP, R

DHEZ, P

机构：

[1] UNIV PARIS SUD, LURE, F-91408 ORSAY, FRANCE

[2] UNIV AIX MARSEILLE 3, DEPT PHYS INTERACT PHOTONS MAT, F-13397 MARSEILLE 13, FRANCE

来源：

OPTICAL ENGINEERING | 1986年 / 25卷 / 08期

关键词：

D O I：

10.1117/12.7973934

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：948 / 953

页数：6

共 17 条

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[9]

HILLIARD JE, 1979, AIP C P, V53, P407

[10]

JEANGUILLAUME C, 1983, SCAN ELECTRON MICROS, P745

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