NONISOTROPIC DEPOSITION FROM A 304 STAINLESS-STEEL CATHODIC ARC SOURCE

被引：4

作者：

POIRIER, DM

LINDFORS, PA

机构：

[1] Department of Electrical Engineering and Electronic Engineering Technology, Mankato State University Mankato, Minnesota 56002-8400

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1991年 / 9卷 / 02期

关键词：

D O I：

10.1116/1.577500

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Films deposited via cathodic arc technology from a 304 stainless-steel cathode were investigated as a function of angle measured from the normal to the surface of the cathode. The composition of the films as measured via energy dispersive x-ray analysis was found to vary with the position of the substrate. In addition the top and bottom layers of the films at all positions were found to be rich in chromium. These results can be understood as stemming from preferential evaporation of Cr from the droplets that are a part of the cathodic arc emission process.

引用

页码：278 / 280

页数：3

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