TRAPPED OXYGEN IN ALUMINUM-OXIDE FILMS AND ITS EFFECT ON DIELECTRIC STABILITY

被引:13
作者
BERNARD, WJ
RUSSELL, PG
机构
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D O I
10.1149/1.2129866
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1256 / 1261
页数:6
相关论文
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