MICROPOROUS SILICA FILMS

被引:8
作者
MAIER, WF
WIEDORN, M
SCHRAMM, HO
机构
[1] Institut für Technische Chemie, Universität‐Gesamthochschule, Essen, W-4300
来源
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH | 1991年 / 30卷 / 11期
关键词
D O I
10.1002/anie.199115091
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A narrow range of pore radii, pore diameters of 6 +/- 2 angstrom, and a porosity of 14% characterize the silicon dioxide films which can be made by the electron beam evaporation of quartz. Thus they offer an alternative to zeolite films for the separation of liquids and gases, and applications in nonlinear optics and microelectronic sensors.
引用
收藏
页码:1509 / 1510
页数:2
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