共 14 条
- [1] CANALI C, 1974, J PHYS D, P1973
- [2] ESAHI M, 1990, SENSOR ACTUAT A-PHYS, V21, P931
- [4] GUVENC MG, 1985, MICROMACHINING MICRO, P215
- [8] PUERS B, 1990, SENSOR ACTUAT A-PHYS, V21, P1036
- [9] BATCH-FABRICATED SILICON ACCELEROMETER [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1911 - 1917
- [10] Ruzicka J., 1981, FLOW INJECTION ANAL