ARE SOURCES OF METALLIC PLASMA FOR COATINGS IN VACUUM AND FOR HIGH-SPEED VACUUM PUMPING

被引：5

作者：

KARPOV, D

机构：

[1] D V Efremov Scientific Research Institute of Electrophysical Apparatus, St Petersburg

来源：

VACUUM | 1995年 / 46卷 / 8-10期

关键词：

D O I：

10.1016/0042-207X(95)00048-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Are sources of metallic plasma are effective facilities for depositing coatings in vacuum and for high speed vacuum pumping. Coatings are formed by condensation in the metallic plasma, generated by the vacuum are, burning in cathode material vapours. The choice of cathode material and residual atmosphere composition determines the chemical structure of the deposited coatings. Shown are two modifications of the are sources notable for their purpose, design and magnetic control method.

引用

页码：825 / 826

页数：2