INFLUENCE OF N-TYPE DOPANTS ON LATTICE LOCATION OF IMPLANTED P-TYPE DOPANTS IN SI AND GE

被引:12
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ERIKSSON, L
FLADDA, G
BJORKQVIST, K
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D O I
10.1063/1.1652771
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O59 [应用物理学];
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页码:195 / +
页数:1
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ERIKSSON L, TO BE PUBLISHED
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[6]   A COMPARISON OF HOT IMPLANTATION BEHAVIOR OF SEVERAL GROUP-3 AND -V ELEMENTS IN SI AND GE [J].
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APPLIED PHYSICS LETTERS, 1967, 11 (12) :365-&
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