DEPTH PROFILE ANALYSIS OF HYDROGENATED CARBON LAYERS ON SILICON BY X-RAY PHOTOELECTRON-SPECTROSCOPY, AUGER-ELECTRON SPECTROSCOPY, ELECTRON ENERGY-LOSS SPECTROSCOPY, AND SECONDARY ION MASS-SPECTROMETRY

被引：34

作者：

SANDER, P ^{[1
]}

KAISER, U ^{[1
]}

ALTEBOCKWINKEL, M ^{[1
]}

WIEDMANN, L ^{[1
]}

BENNINGHOVEN, A ^{[1
]}

SAH, RE ^{[1
]}

KOIDL, P ^{[1
]}

机构：

[1] FRAUNHOFER INST ANGEW FESTKORPERPHYS,D-7800 FREIBURG,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574623

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1470 / 1473

页数：4

共 15 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
AISENBERG, S
CHABOT, R
[J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
[2] BOSZO F, 1984, J VAC SCI TECHNOL A, V2, P1271
[3] BUBENZER A, 1983, J APPL PHYS, V54, P2590
[4] EARLY STAGES OF OXYGEN-ADSORPTION ON SILICON SURFACES AS SEEN BY ELECTRON-SPECTROSCOPY
CARRIERE, B
DEVILLE, JP
[J]. SURFACE SCIENCE, 1979, 80 (01) : 278 - 286
[5] DISCHLER B, 1985, 7TH P INT S PLASM CH, V1, P45
[6] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS
ENKE, K
[J]. THIN SOLID FILMS, 1981, 80 (1-3) : 227 - 234
[7] SURFACE-ANALYSIS OF DIAMONDLIKE CARBON-FILMS
GREEN, AK
REHN, V
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04): : 1877 - 1879
[8] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA
HOLLAND, L
OJHA, SM
[J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116
[9] KAISER U, 1985, SPRINGER SERIES CHEM, V44, P323
[10] Khvostov V. V., 1985, Soviet Physics - Solid State, V27, P543