DETERMINATION OF PLASMA GAS TEMPERATURE DURING REACTIVE SPUTTER ETCHING

被引：19

作者：

OSHIMA, M

机构：

来源：

关键词：

D O I：

10.1143/JJAP.17.1157

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1157 / 1158

页数：2

共 6 条

[1] Temperatures indicated by intensity distributions in band spectrum
Duffendack, OS
Revans, RW
Roy, AS
[J]. PHYSICAL REVIEW, 1934, 45 (11): : 0807 - 0814
[2] Herzberg G., 1950, SPECTRA DIATOMIC MOL, V1
[3] The intensities of the band lines
Honl, H
London, F
[J]. ZEITSCHRIFT FUR PHYSIK, 1925, 33 : 803 - 809
[4] Pearse R. W. B., 1963, IDENTIFICATION MOL S
[5] NEW TECHNIQUE FOR STUDY OF TEST TIME AND RAREFACTION WAVE EFFECTS IN HYPERSONIC SHOCK-TUBES
PHILLIPS, MGR
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (12) : 1359 - &
[6] Slovetskii D. I., 1974, Optics and Spectroscopy, V36, P265