ELLIPSOMETRICAL DETERMINATION OF THE OPTICAL-CONSTANTS OF GOLD IN THE VACUUM ULTRAVIOLET REGION

被引：7

作者：

KANDAKA, N ^{[1
]}

YURI, M ^{[1
]}

FUKUTANI, H ^{[1
]}

KOIDE, T ^{[1
]}

SHIDARA, T ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,PHOTON FACTORY,TSUKUBA,IBARAKI 305,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.1143040

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An ellipsometer has been designed and constructed for use in the vacuum ultraviolet region. To test the performance of the ellipsometer, the optical constants of Au were determined in the energy region 15-28 eV. The theoretical background and the experimental procedures of our ellipsometer are described.

引用

页码：1450 / 1453

页数：4

共 13 条

[1]

Aspnes D.E, 1985, HDB OPTICAL CONSTANT

[2] DIELECTRIC FUNCTION OF CAF2 BETWEEN 10 AND 35 EV [J].

BARTH, J ;

JOHNSON, RL ;

CARDONA, M ;

FUCHS, D ;

BRADSHAW, AM .

PHYSICAL REVIEW B, 1990, 41 (05) :3291-3294

[3]

Barth J., 1986, SPIE, V733, P265, DOI 10.1117/12.964920

[4]

CANFIELD LR, 1964, J PHYS-PARIS, V25, P81

[5] POLARIZATION STUDIES IN VACUUM ULTRAVIOLET [J].

HAMM, RN ;

MACRAE, RA ;

ARAKAWA, ET .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1965, 55 (11) :1460-&

[6]

HORTON VG, 1969, APPL OPTICS, V7, P1917

[7] DESIGN CRITERIA FOR REFLECTION POLARIZERS AND ANALYZERS IN VACUUM ULTRAVIOLET [J].

HUNTER, WR .

APPLIED OPTICS, 1978, 17 (08) :1259-1270

[8] DESIGN AND PERFORMANCE OF A VUV ELLIPSOMETER [J].

JOHNSON, RL ;

BARTH, J ;

CARDONA, M ;

FUCHS, D ;

BRADSHAW, AM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 290 (2-3) :606-612

[9]

JOHNSON RL, 1988, 3RD P INT C SYNCHR R, P2209

[10] ELLIPTIC-POLARIZATION ANALYSES OF SYNCHROTRON RADIATION IN THE 5-80-EV REGION WITH A REFLECTION POLARIMETER [J].

KOIDE, T ;

SHIDARA, T ;

YURI, M ;

KANDAKA, N ;

YAMAGUCHI, K ;

FUKUTANI, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1991, 308 (03) :635-644

← 1 2 →