PARALLEL AND PIPELINED FRONT-END FOR MULTIELEMENT SILICON DETECTORS IN SCANNING ELECTRON-MICROSCOPY

被引:3
作者
BOULIN, C
EPSTEIN, A
机构
[1] EMBL - Physical Instrumentation, Meyerhofstraβe 1
关键词
Computer Systems; Digital--Pipeline Processing - Integrated Circuits--Applications - Microscopic Examination--Scanning Electron Microscopy - Particle Detectors - Semiconductor Devices;
D O I
10.1109/23.277487
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A silicon quadrant detector (128 elements) was implemented as an electron detector in a Scanning Transmission Electron Microscope. As the electron beam scans over the sample, electrons are counted during each pixel. We developed an ASIC for the multichannel counting system. The digital front-end carries out the readout of all elements, in four groups, and uses these data to compute linear combinations to generate up to eight simultaneous images. For the preprocessing we implemented a parallel and pipelined system. Dedicated software tools were developed to generate the programs for all the processors. These tools are transparently accessed by the user via a user friendly interface.
引用
收藏
页码:226 / 231
页数:6
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