EXCITATION EFFICIENCY OF ATOMS EJECTED DURING ION-BEAM SPUTTERING

被引：22

作者：

TSONG, IST ^{[1
]}

机构：

[1] MONASH UNIV,DEPT PHYS,CLAYTON 3168,VICTORIA,AUSTRALIA

来源：

关键词：

D O I：

10.1016/0039-6028(77)90136-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：609 / 618

页数：10

共 28 条

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