A METHOD FOR DETERMINING PLASMA SPACE POTENTIAL BY AN RF PROBE

被引：11

作者：

DOTE, T

机构：

[1] The Institute of Physical and Chemical Research, Yamatomachi, Kitaadachigun, Saitama

来源：

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1969年 / 27卷 / 06期

关键词：

D O I：

10.1143/JPSJ.27.1640

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A method for measuring the space potential of a plasma by means of RF characteristics of Langmuir probe is presented. The principle of the method is based upon a behavior of the RF impedence of the plasma-sheath and -probe system. The sensitivity of the method is expected to be very high, since the RF characteristic at the space potential is much remarkable. For example, it was possible to obtain the space potential in order of 2 mV in a mercury diffusion plasma. © 1969, THE PHYSICAL SOCIETY OF JAPAN. All rights reserved.

引用

页码：1640 / &

共 21 条

[1] A NEW METHOD FOR DETERMINATION OF PLASMA POTENTIAL BY A TWIN PROBE [J].