Two types of epitaxial films of lutetium diphthalocyanine, LuPc 2, have been obtained on KBr, LuPc2 /KBr, and on the film of fluoro-bridged aluminum phthalocyanine polymer, (AlPcF)n, on KBr, LuPc2 /(AlPcF)n /KBr, by the molecular beam epitaxy technique. Their structures have been studied by transmission electron microscopy as well as scanning electron microscopy. The phase of LuPc 2 /KBr is bidirectionally oriented tetragonal, KBr(100)((10) 1/2×(10)1/2) R±27°-LuPc2. The phase of LuPc2 /(AlPcF)n /KBr is predominantly unidirectionally oriented tetragonal, KBr(100)(3×3)R45°-LuPc 2 /(AlPcF)n, but some bidirectional orthorhombic phase, KBr(100)C(6×3)R45°-LuPc2 /(AlPcF)n, is also present.