MODELING OF THE FIELD TRANSFER THROUGH THICK DIELECTRIC LINES - USE IN LINEWIDTH MEASUREMENT

被引：2

作者：

DEPASSE, FM

COURJON, DA

机构：

[1] University of Franche-Comte-Besancon, P.M. Duffieux Optics Laboratory, CNRS, Paris, 214

来源：

APPLIED OPTICS | 1991年 / 30卷 / 11期

关键词：

D O I：

10.1364/AO.30.001355

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A numerical method for calculating the optical image of a thick line object is presented. It consists of slicing (fictitiously) the object and of analyzing the propagation through each elementary slice. The method is first developed for coherent light and then generalized for partially coherent illumination. Some results are compared with other simulations and with experiments.

引用

页码：1355 / 1360

页数：6

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