A REVIEW OF CATHODIC ARC PLASMA DEPOSITION PROCESSES AND THEIR APPLICATIONS

被引：67

作者：

RANDHAWA, H

JOHNSON, PC

机构：

来源：

关键词：

D O I：

10.1016/0257-8972(87)90157-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：303 / 318

页数：16

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