CURRENT ISSUES AND PROBLEMS IN THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND

被引:626
作者
YARBROUGH, WA
MESSIER, R
机构
[1] PENN STATE UNIV, DEPT SOLID STATE SCI, UNIVERSITY PK, PA 16802 USA
[2] PENN STATE UNIV, DEPT ENGN SCI & MECH, UNIVERSITY PK, PA 16802 USA
关键词
D O I
10.1126/science.247.4943.688
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Current issues and problems in the chemical vapor deposition (CVD) of diamond are those which relate to its characterization, its nucleation on foreign surfaces, the question of its formation in preference to the other phases of solid carbon (for example, graphite, chaoite, or lonsdaleite), why different morphologies and crystallographic orientations (textures) are seen in different experiments or with different parameters in the same experiment, and finally whether well-crystallized metastable phases can be obtained by CVD in other material systems or are only a peculiarity of carbon chemistry. Whether a given carbon coating is justly described as diamond has been such an issue, and coatings should clearly show evidence for diamond by x-ray diffraction and Raman spectroscopy before the claim of diamond is made. Experimental results have not been consistent in many cases, and much work remains to be done before an accurate assessment can be made of the technological impact of the development.
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页码:688 / 696
页数:9
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