RESULTS OF A JOINT AUGER-ESCA ROUND ROBIN SPONSORED BY ASTM COMMITTEE E-42 ON SURFACE-ANALYSIS .1. ESCA RESULTS

We report results of a round robin involving binding-energy (BE) and relative-intensity measurements on high-purity samples of gold and copper by X-ray. We have conducted an extensive round robin involving ESCA or XPS measurements on high-purity samples of Ni, Au, and Cu. The Ni sample was used to estab. This round robin had three principal objectives. First, it was intended to assess the overall accuracy of BE and intensity measurements in XPS measurem. Second, it was intended to establish an empirical intensity calibration of one type of XPS instrument versus another from the reported intensity ratios. Third, it was desired to determine the peak position and peak shape for the carbon 1s photoelectron line originating for adventitious" carbona. We have made an extensive analysis of trends in the BE and intensity data. We have computed deviations of individual BE measurements from the median va. The two types of plots just described based on BE and intensity data can be regarded as "response functions" that describe the performance of indiv. We have invoked Occam's Razor to distinguish instruments with response functions which vary monotonically with electron energy from those instruments w. The reported spreads in BE and relative-intensity data reported here indicate that improved calibration and operating procedures are required for XPS m. © 1979."