SURFACE CHARACTERIZATION VIA OPTICAL DIFFRACTION

被引：2

作者：

MANSFIELD, D

机构：

来源：

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1992年 / 32卷 / 1-2期

关键词：

D O I：

10.1016/0890-6955(92)90054-K

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Through the consideration of a surface as a reflective phase grating, this paper establishes the various relationships between the statistical parameters of the surface topology and the far-field diffraction pattern. These relationships have been incorporated into a new measuring instrument designed primarily for the measurement of flats and cylinders, the Talyfine. The performance of this instrument is compared against an established stylus-based surface texture measuring instrument, the Talystep.

引用

页码：11 / 17

页数：7